VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Native SiO2/Si wafer, grazing X-ray angle
1
 
NORM
REGULAR
1
0
0
0
0
0
1
 
Native SiO2/Si wafer, grazing X-ray angle
2003
5
10
15
45
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.4
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
107
-0.0392157
2
counts
d
Transmission
d
pulse counting
0.2
61
4.00E-06
0
0
0
0
512
78.56
2673.36
6.898
6.948
178.52
6.898
167.52
6.8982
164.76
6.89839
166
6.89859
166.44
6.89878
166.64
6.89898
167.4
6.89918
167.64
6.89937
168.4
6.89957
167.76
6.89976
168
6.89996
168.4
6.90016
169.24
6.90035
168
6.90055
167.8
6.90075
167.12
6.90094
165.12
6.90114
162.76
6.90133
162.56
6.90153
160.96
6.90173
160
6.90192
160.24
6.90212
160.16
6.90231
157.92
6.90251
157.48
6.90271
155.24
6.9029
153.2
6.9031
152.36
6.90329
153.8
6.90349
154
6.90369
154.96
6.90388
155.84
6.90408
154.72
6.90427
152
6.90447
150.44
6.90467
150.64
6.90486
150.52
6.90506
153.24
6.90525
155.8
6.90545
158.16
6.90565
159.64
6.90584
162.44
6.90604
164.24
6.90624
168.16
6.90643
172.6
6.90663
178.16
6.90682
184
6.90702
190.6
6.90722
197.04
6.90741
204.16
6.90761
210.56
6.9078
215.76
6.908
221.24
6.9082
227.28
6.90839
232.52
6.90859
237.68
6.90878
246.36
6.90898
255.84
6.90918
266.12
6.90937
278.48
6.90957
293.36
6.90976
307.2
6.90996
322.44
6.91016
336.4
6.91035
350.76
6.91055
365.8
6.91075
383.2
6.91094
398.56
6.91114
416.36
6.91133
436.04
6.91153
455.28
6.91173
470.2
6.91192
486.64
6.91212
503.36
6.91231
517.08
6.91251
528.32
6.91271
542.4
6.9129
556.84
6.9131
567.56
6.91329
578.68
6.91349
591.4
6.91369
602.8
6.91388
612.2
6.91408
624.12
6.91427
632.64
6.91447
641.8
6.91467
647.36
6.91486
650.24
6.91506
650.48
6.91525
651.12
6.91545
647.28
6.91565
647.28
6.91584
648.28
6.91604
646.8
6.91624
645.96
6.91643
644.04
6.91663
635.88
6.91682
627.8
6.91702
622.08
6.91722
615.28
6.91741
607.6
6.91761
601.16
6.9178
593.4
6.918
581.44
6.9182
569.08
6.91839
560.4
6.91859
551.56
6.91878
541.64
6.91898
533.64
6.91918
522.44
6.91937
505.72
6.91957
491.32
6.91976
474.48
6.91996
459.08
6.92016
446.8
6.92035
437.72
6.92055
426.72
6.92075
419.52
6.92094
410.04
6.92114
398.48
6.92133
386.84
6.92153
374.28
6.92173
359.48
6.92192
344.28
6.92212
329.68
6.92231
313.16
6.92251
296.28
6.92271
281.08
6.9229
267.52
6.9231
254.32
6.92329
244.48
6.92349
237.88
6.92369
230.8
6.92388
223.28
6.92408
216.96
6.92427
209.24
6.92447
199.96
6.92467
192.48
6.92486
185.8
6.92506
180.36
6.92525
177.16
6.92545
175.96
6.92565
175.04
6.92584
176.76
6.92604
179.08
6.92624
180.4
6.92643
182.2
6.92663
184.08
6.92682
184.76
6.92702
185.84
6.92722
188.72
6.92741
190.64
6.92761
193.04
6.9278
196.4
6.928
197.76
6.9282
198.64
6.92839
202.28
6.92859
206.72
6.92878
213.24
6.92898
225.16
6.92918
241.12
6.92937
260.64
6.92957
286.16
6.92976
317.56
6.92996
357.88
6.93016
410.76
6.93035
475.96
6.93055
556.24
6.93075
654.04
6.93094
766.52
6.93114
890.88
6.93133
1027.72
6.93153
1167.8
6.93173
1302.36
6.93192
1420.68
6.93212
1509.48
6.93231
1559.4
6.93251
1571.52
6.93271
1545.6
6.9329
1494.52
6.9331
1438.12
6.93329
1396.88
6.93349
1385.04
6.93369
1422.88
6.93388
1514.24
6.93408
1659.04
6.93427
1844.04
6.93447
2058.68
6.93467
2269.12
6.93486
2462.4
6.93506
2604.44
6.93525
2673.36
6.93545
2649.56
6.93565
2539.6
6.93584
2335.68
6.93604
2065.48
6.93624
1760.04
6.93643
1447.56
6.93663
1152.8
6.93682
896.84
6.93702
691.44
6.93722
530.88
6.93741
411.6
6.93761
323.76
6.9378
261.16
6.938
212.8
6.9382
177.56
6.93839
152
6.93859
133.52
6.93878
122.48
6.93898
115
6.93918
109.6
6.93937
105.32
6.93957
102.64
6.93976
98.88
6.93996
97.04
6.94016
96.24
6.94035
96.6
6.94055
95.68
6.94075
95.36
6.94094
93.8
6.94114
92.4
6.94133
90.92
6.94153
91.32
6.94173
92.32
6.94192
94.44
6.94212
96.4
6.94231
98.12
6.94251
97.92
6.94271
96.52
6.9429
95.36
6.9431
94.24
6.94329
92.48
6.94349
93.16
6.94369
94.92
6.94388
95.48
6.94408
95.88
6.94427
96.88
6.94447
96.32
6.94467
95.48
6.94486
94.64
6.94506
94.52
6.94525
93.8
6.94545
93.16
6.94565
91.4
6.94584
89.96
6.94604
86.32
6.94624
83.52
6.94643
80.84
6.94663
79.28
6.94682
78.56
6.94702
80.8
6.94722
82.88
6.94741
85.56
6.94761
89.12
6.9478
91.84
6.948
end of experiment
